Microscopic DIC measurement technology is employed to measure thermal warpage and deformation in chips. Thanks to key advantages—such as non-contact operation, sub-micron precision, full-dimensional data output, and stability across the entire temperature range—it has become the standardized technical approach for the quantitative inspection of thermal warpage, thermal deformation, and thermal stress. Representative equipment, such as the XTOP3D XTDIC-MICRO microscopic DIC system, comprehensively addresses inspection needs across the entire value chain, including chip R&D, packaging processes, reliability verification, and failure analysis.