XTDIC-MICRO Series

3D microstrain measurement system

Microscopic strain measurement, microscopic dic system, microscopic strain measurement system, three-dimensional microscopic strain measurement system
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Microscale Mechanical In-Situ Loading and DIC Measurement Solutions
The XTDIC-MICRO 3D microscopic strain measurement system combines a stereo microscope with DIC technology, addressing the limitations of traditional 3D measurement methods for measuring the deformation of tiny objects with nanometer-level accuracy. The microscopic DIC system can be combined with mechanical/thermal testing machines to provide measurement solutions for mechanical and thermodynamic studies of materials as small as 1-10 mm.
Technical characteristics

Technical characteristics

• Measurement field of view 1-10mm
• Accuracy up to 20με, range 0.005%-500%
• Chip warpage accuracy 0.1μm
• 2D and 3D coordinates, displacement, deformation
• Multiple strain tensors
• Elastic modulus, Poisson's ratio, n-value, r-value, yield strength
• Material parameter determination (CTE)
• High-precision photolithography calibration element
• Microscopic automatic calibration technology, microspotting technology
• Rigid displacement elimination technology, fogging suppression technology, thermal airflow suppression technology
• Thermal research, temperature chamber (-190-600°C)
• Micro-material mechanical testing, testing machine (5000N)

Intelligent software

XTDIC software allows direct control of the measurement head and controller to complete various testing tasks. The software automatically calculates test data and provides powerful post-processing and report generation capabilities.
Full-field displacement and strain measurement based on speckle matching;
Motion trajectory posture measurement based on marker detection;
Static deformation measurement based on photogrammetry;
Keypoint motion trajectory measurement based on feature matching.
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Intelligent software
Typical Configuration
Model XTDIC-MICRO-SD XTDIC-MICRO-SR XTDIC-MICRO-HR
Specification 5M 5M 12M
Camera resolution 5 megapixels x2 5 megapixels x2 12 megapixels x2
Camera frame rate
75fps 75fps 30 fps
Strain measurement accuracy 30με 30με 20με
Strain measurement range 0.005%~500% 0.005%~500% 0.005%~500%
Measuring field of view 2mm~10mm 1mm~10mm 1.5mm~13mm
Working distance 83.4mm 61.5mm 61.5mm
Total magnification 0.6x~4.8x 0.64x~8x 0.64x~8x
Industry Applications
The XTDIC-MICRO microstrain measurement system is suitable for three-dimensional full-field strain and deformation measurement of small-sized specimens. It is widely used in mechanical property testing of mesoscopic material specimens, chip thermal expansion and thermal warpage, CTE parameter determination, semiconductor design verification and process improvement, and other fields.
  • +Chip thermal warpage
  • +Material Testing
  • +CTE parameter determination
  • +Design verification and process improvement