Semiconductor

The XTDIC-MICRO three-dimensional microscopic strain measurement system combines DIC technology with a stereo microscope. Using algorithms and image correction techniques to avoid drift and distortion, it obtains accurate measurements of specimen deformation. It is suitable for semiconductor thermodynamic testing and can perform mesoscopic material testing, chip thermal expansion/warpage, and thermal deformation analysis.

Chip thermal warpage DIC measurement, semiconductor thermal deformation DIC measurement, PCB welding deformation DIC measurement, wafer thermal deformation DIC measurement_XTOP3D
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Empowering Scenarios
  • The XTDIC-MICRO micro-strain measurement system, when used with various in-situ loading testers, can perform multi-performance mechanical property tests such as tension, compression, and cycling on mesoscopic specimens, achieve full-field strain measurement of tiny specimens, and obtain stress-strain engineering curves.

    Mesoscopic material mechanical testing

    Mesoscopic material mechanical testing

  • The XTDIC-MICRO microstrain measurement system, combined with an optical hot and cold stage, can analyze chip warpage at different temperatures, outputting warpage contours, curves, and strain data for each temperature point. It can also analyze the out-of-plane displacement of the chip surface to obtain the warpage distribution, and can analyze the full-field 2D displacement and strain fields.
    Chip thermal warpage test

    Chip thermal warpage test

  • The XTDIC-MICRO microstrain measurement system, combined with an optical hot and cold stage for temperature loading, performs thermal expansion (CTE) tests on specimens, outputs CTE at different positions in the X and Y directions, and semiconductor thermal expansion test data, helping to improve the stability of semiconductor devices.

    Expansion coefficient test for circuit boards, single crystal silicon, etc.

    Expansion coefficient test for circuit boards, single crystal silicon, etc.

  • The XTDIC-MICRO microstrain measurement system, combined with a temperature-controlled chamber, analyzes the dynamic deformation of semiconductors during temperature changes and packaging process testing. This allows the mechanical properties of different chip cross-section materials to be evaluated under temperature changes, and the reliability of the materials can be verified by comparing them with the theoretical design values.

    Semiconductor deformation testing

    Semiconductor deformation testing

  • Application Cases
    • DIC Full-Field Measurement Solution for Chip Warpage and Thermal Deformation
      XTOP3D's full-field deformation measurement DIC technology acquires baseline profile data, tracks displacement data of identical points under varying temperature loads, and calculates and analyzes strain data. This allows for simultaneous analysis of chip warpage, soldering process evaluation, and strain concentration between different cross-section materials. CTE measurement can further identify chip thermal warpage and CTE mismatch issues.
    • Microscopic DIC technology for single crystal silicon thermal expansion warpage CTE measurement
      The thermal warpage experiment uses the Xintuo 3D XTDIC-MICRO microscopic strain measurement system and temperature controller (temperature control ±0.1°C). Based on microscopic DIC technology, a chip thermal warpage measurement platform is built to carry out thermal warpage tests on typical stacked structures, realizing real-time observation of thermal warpage of multilayer boards during heating.
    • Warpage and Microscopic DIC Measurement Solutions for Advanced Chip Packaging
      In experimental observations of structural thermal warpage, the focus is on measuring out-of-plane displacements caused by thermal warpage. The XTOP3D XTDIC-MICRO three-dimensional microstrain measurement system, combining digital image correlation (DIC) technology with a stereo microscope, can be used to measure surface deformation, strain, and warpage of chip specimens under applied loads and at different temperatures. Using a stereo microscope and software for complex distortion correction enables high-magnification measurements, making it suitable for measuring chip Z-direction displacement and warpage.
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      3D microstrain measurement system